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Yingde gases excimer laser gas receives critical certification

In November 2023, Shanghai Ji Liang Standard Reference Gases Co., Ltd., a subsidiary of Yingde Gases, successfully finished the qualification process and became a qualified supplier of excimer laser gases which was certified by Coherent. A 193nm-premix for the ExciStar-laser was tested at Coherent facilities in Germany and fulfilled all necessary specifications. This is a key step in the development of Yingde Gases' electronic specialty gases, which will further meet the needs of China's semiconductor, medical and other laser applications.

Coherent is a leading enterprise in the laser industry, and its excimer laser gas qualification is highly recognized in the industry which is also very strict for suppliers. However, relying on the profound accumulation of gas technology and extensive practical experience in the field of electronic special gases, Shanghai Ji Liang successfully passed the Coherent qualification test with the first application and certified as the qualified supplier. With this certification, Shanghai Ji Liang is able to provide high-quality laser mixing gas for the medical, photolithography, OLED display and other industries, and provide a strong impetus for the development of high quality in the high-end manufacturing industry.

Formerly known as the Gas Research Laboratory of Shanghai Institute of Measurement and Testing Technology, Shanghai Ji Liang mainly produces standard gases, mixed special gases, high purity gases and rare gases, and carries out the research and development of gas testing services and testing instruments. It has obtained the "Measurement Management System Certification" issued by Zhongqi Measurement System Certification Center, the CMC (China Metrology Certification), the CMA (China Inspection Body and Laboratory Mandatory Approval) qualification.


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