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Yingde Gases’ Excimer Laser Gases Received Another Industrial Approval 


Shanghai Jiliang Standard Reference Gases Co., Ltd., a subsidiary of Yingde Gases, recently successfully passed the machine test of argon and fluorine excimer laser gases of Shanghai Integrated Circuit Research & Development Center (herein referred to as ICRD). This is another industrial recognition of Yingde Gases’ excimer laser gases after certified by Coherent in 2023, a further breakthrough for Yingde Gases to support the development of China’s semiconductor industry.

Excimer laser is a type of infrared light with a wide range of applications in heavy industry, medicine, healthcare, and scientific research. Yingde Gases’ excimer laser gases have already been applied widely in these sectors. Possessing a solid technical foundation and robust R&D deployment, Yingde Gases is able to control the gas mixture precisely, thereby satisfying laser excitation criteria. The corporate relied on its advanced process technology and high-stability products to pass the ICRD test, expediting the domestic production of excimer laser gases.

As a forerunner in the campaign to manufacture domestic alternatives to products previously sourced overseas, Yingde Gases strives to innovate and achieve new breakthroughs in advanced manufacturing. Laser gases mixture is a core gas in chip manufacturing. With ICRD’s approval, Yingde Gases’ laser gas mixtures will be able to meet the needs of the domestic semiconductor materials market, offering clients even more options. Going forward, Yingde Gases will continue to expand in the areas of special gases for high-end electronics as well as gas mixtures for laser applications, helping to secure key technologies for domestic production.

 

About the Shanghai Integrated Circuit Research & Development Center

The Shanghai Integrated Circuit Research & Development Center (ICRD) was established in 2002 as a nexus for collaboration among industry interests and scholastic researchers, and as a center for the research and development of integrated circuits. ICRD was formed with a joint investment by China-based universities and corporations specializing in integrated circuits. It is an independent public R&D institute oriented towards the entire integrated circuit industry, as well as universities and research institutes. ICRD strives to resolve the R&D and support issues associated with commonly applied technologies, while providing a public platform for the testing and validation of equipment and materials, as well as a training facility for corporations and universities to cultivate integrated circuit experts and highly specialized personnel.

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